Invention Application
US20150184289A1 DEPOSITION APPARATUS AND DEPOSITION METHOD 审中-公开
沉积装置和沉积方法

DEPOSITION APPARATUS AND DEPOSITION METHOD
Abstract:
An apparatus may be used for forming a material layer on a substrate. The apparatus may include a reactor that includes a supply unit set configured to supply a material to the substrate. The apparatus may further include a control mechanism configured to control whether the material is provided to the supply unit set according to a position of the substrate with respect to the reactor.
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