Invention Application
- Patent Title: DEPOSITION APPARATUS AND DEPOSITION METHOD
- Patent Title (中): 沉积装置和沉积方法
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Application No.: US14468042Application Date: 2014-08-25
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Publication No.: US20150184289A1Publication Date: 2015-07-02
- Inventor: Yong Suk LEE , Suk Won JUNG , Myung Soo HUH
- Applicant: Samsung Display Co., Ltd.
- Priority: KR10-2013-0167560 20131230
- Main IPC: C23C16/44
- IPC: C23C16/44 ; C23C16/52

Abstract:
An apparatus may be used for forming a material layer on a substrate. The apparatus may include a reactor that includes a supply unit set configured to supply a material to the substrate. The apparatus may further include a control mechanism configured to control whether the material is provided to the supply unit set according to a position of the substrate with respect to the reactor.
Information query
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