Invention Application
- Patent Title: THIN FILM TRANSISTOR ARRAY PANEL AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 薄膜晶体管阵列及其制造方法
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Application No.: US14466317Application Date: 2014-08-22
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Publication No.: US20150200212A1Publication Date: 2015-07-16
- Inventor: Zhu XUN , Jae Woo PARK , Jae Won SONG , Keum Hee LEE , June Whan CHOI
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Priority: KR10-2014-0003548 20140110
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L21/443 ; H01L21/4763 ; H01L29/45 ; H01L29/417

Abstract:
A thin film transistor array panel is provided as follows. A gate electrode is disposed on a substrate. A semiconductor layer is disposed on the gate electrode. A gate insulating layer is disposed between the gate electrode and the semiconductor layer. A source electrode is disposed on a first side of the semiconductor layer, having a first lateral surface. A drain electrode is disposed on a second side of the semiconductor layer, having a second lateral surface. The first and second lateral surfaces define a spacing which overlaps the gate electrode. A metal silicide layer is disposed on the first and second lateral surfaces. A passivation layer is disposed on the metal silicide layer, the source electrode and the drain electrode. The passivation layer is not in contact with the first and second lateral surfaces.
Public/Granted literature
- US09515093B2 Thin film transistor array panel and method for manufacturing the same Public/Granted day:2016-12-06
Information query
IPC分类: