Invention Application
US20150219805A1 UV AND DUV EXPANDED COLD MIRRORS 有权
UV和DUV扩展冷镜

UV AND DUV EXPANDED COLD MIRRORS
Abstract:
An expanded cold mirror is provided. The mirror includes a substrate and a coating deposited on the substrate. The coating includes a first coating stack comprising at least one period of a low refractive index metal oxide coating layer and a high refractive index metal oxide coating layer, a second coating stack comprising at least one period of a low refractive index metal fluoride coating layer and a high refractive index metal oxide layer, and a third coating stack comprising at least one period of a low refractive index metal fluoride coating layer and a high refractive index metal fluoride coating layer.
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