发明申请
- 专利标题: THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING THE SAME, TFT ARRAY SUBSTRATE AND DISPLAY DEVICE
- 专利标题(中): 薄膜晶体管及其制造方法,TFT阵列基板和显示装置
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申请号: US14466218申请日: 2014-08-22
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公开(公告)号: US20150236128A1公开(公告)日: 2015-08-20
- 发明人: Shoukun WANG , Huibin GUO , Xiaowei LIU , Yuchun FENG , Zongjie GUO
- 申请人: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- 优先权: CN201410054172.7 20140218
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/786 ; H01L27/12 ; H01L21/265
摘要:
The present invention discloses a method for manufacturing a thin-film transistor, comprising the steps of: forming a semiconductor active layer, and a doped semiconductor active layer; forming a source-drain metal layer; forming a channel region; and implanting ions for lowering the TFT leakage current into the surface of the semiconductor active layer in the channel region via ion implantation after forming the channel region. The invention further relates to a thin-film transistor, a TFT array substrate and a display device. The invention has the following beneficial effects: by implanting ions for lowering the TFT leakage current into the channel region, the electrical performance of a TFT may be improved, and the thickness of a semiconductor active layer in a channel region may be changed controllably.
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