发明申请
US20150260985A1 LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD 审中-公开
激光加工设备和激光加工方法

LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
摘要:
In a laser processing apparatus and a laser processing method, a laser beam radiated from a laser oscillator is positioned on one minute diffraction pattern or over two or more minute diffraction patterns provided in a diffraction optical element by a moving unit. A laser beam to which a desired beam profile is given is reflected at an angle in which the laser beam is radiated to a target position on a processed object by a scanning unit, and the laser beam is transmitted through the lens unit a position in the Z-axis direction of which is controlled so that a focal point of the lens unit corresponds to the surface of the processed object. The processed object is irradiated with a laser beam converged by the lens unit and having a desired laser beam profile to realize desired processing.
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