发明申请
US20150271919A1 CONDUCTIVE PATTERN FORMATION METHOD, CONDUCTIVE PATTERN-BEARING SUBSTRATE, AND TOUCH PANEL SENSOR
有权
导电图案形成方法，导电图案轴承衬底和触摸面板传感器
- 专利标题： CONDUCTIVE PATTERN FORMATION METHOD, CONDUCTIVE PATTERN-BEARING SUBSTRATE, AND TOUCH PANEL SENSOR
- 专利标题（中）： 导电图案形成方法，导电图案轴承衬底和触摸面板传感器
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申请号： US14732817申请日： 2015-06-08
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公开(公告)号： US20150271919A1公开(公告)日： 2015-09-24
- 发明人: Hiroshi Yamazaki , Yoshimi lgarashi
- 申请人： Hitachi Chemical Company, Ltd.
- 优先权： JP2011-219176 20111003
- 主分类号： H05K1/03
- IPC分类号： H05K1/03 ; G03F7/09 ; H05K3/06
摘要：
A conductive pattern formation method of the present invention includes a first exposure step of radiating active light in a patterned manner to a photosensitive layer including a photosensitive resin layer provided on a substrate and a conductive film provided on a surface of the photosensitive resin layer on a side opposite to the substrate; a second exposure step of radiating active light, in the presence of oxygen, to some or all of the portions of the photosensitive layer not exposed at least in the first exposure step; and a development step of developing the photosensitive layer to form a conductive pattern following the second exposure ste