发明申请
US20150283670A1 GRINDING WHEEL AND CLEANING METHOD FOR GRINDING CHAMBER 有权
磨床的研磨轮和清洁方法

  • 专利标题: GRINDING WHEEL AND CLEANING METHOD FOR GRINDING CHAMBER
  • 专利标题(中): 磨床的研磨轮和清洁方法
  • 申请号: US14662491
    申请日: 2015-03-19
  • 公开(公告)号: US20150283670A1
    公开(公告)日: 2015-10-08
  • 发明人: Takahiko Tsuno
  • 申请人: DISCO CORPORATION
  • 优先权: JP2014-077996 20140404
  • 主分类号: B24B53/007
  • IPC分类号: B24B53/007 B08B9/093 B24D7/18
GRINDING WHEEL AND CLEANING METHOD FOR GRINDING CHAMBER
摘要:
A grinding wheel includes an annular base and a plurality of abrasive members fixed to the lower surface of the base and arranged annularly. The base has a plurality of through holes for discharging a grinding water. The plural through holes radially extend from the inner side surface to the outer side surface of the base. The plural through holes are arranged at given intervals in the circumferential direction of the base so that the grinding water is scattered in different directions from the through holes.
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