发明申请
- 专利标题： METHOD AND SYSTEM FOR MAINTAINING AN EDGE EXCLUSION SHIELD
- 专利标题（中）： 维护边缘防护罩的方法和系统
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申请号： US14440943申请日： 2012-11-15
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公开(公告)号： US20150303041A1公开(公告)日： 2015-10-22
- 发明人: Ralph LINDENBERG , Erkan KOPARAL
- 申请人： Ralph LINDENBERG , Erkan KOPARAL
- 国际申请： PCT/EP2012/072777 WO 20121115
- 主分类号： H01J37/34
- IPC分类号： H01J37/34
摘要：
A method for extracting a shielding element from a processing chamber of a substrate processing system or inserting the shielding element into the processing chamber is provided. The substrate processing system includes the processing chamber, a first shielding element for excluding application of material onto parts of a substrate, and a substrate transportation system for transporting substrates or substrate carriers into and out of the processing chamber. The method includes transporting the first shielding element by the substrate transportation system.
公开/授权文献
- US09640372B2 Method and system for maintaining an edge exclusion shield 公开/授权日：2017-05-02
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