Invention Application
US20150311128A1 DISPLAY ELEMENT MANUFACTURING METHOD AND MANUFACTURING APPARATUS
审中-公开
显示元件制造方法和制造设备
- Patent Title: DISPLAY ELEMENT MANUFACTURING METHOD AND MANUFACTURING APPARATUS
- Patent Title (中): 显示元件制造方法和制造设备
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Application No.: US14736567Application Date: 2015-06-11
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Publication No.: US20150311128A1Publication Date: 2015-10-29
- Inventor: Tomohide HAMADA , Kei NARA
- Applicant: NIKON CORPORATION
- Applicant Address: JP TOKYO
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP TOKYO
- Priority: JPP2008-167270 20080626
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L27/32 ; H01L51/56

Abstract:
The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.
Public/Granted literature
- US09917023B2 Display element manufacturing method and manufacturing apparatus Public/Granted day:2018-03-13
Information query
IPC分类: