Invention Application
US20150311128A1 DISPLAY ELEMENT MANUFACTURING METHOD AND MANUFACTURING APPARATUS 审中-公开
显示元件制造方法和制造设备

DISPLAY ELEMENT MANUFACTURING METHOD AND MANUFACTURING APPARATUS
Abstract:
The display element manufacturing apparatus has a transporting part, which transports a substrate in a first direction, a first alignment system, which detects fiducial marks, a second alignment system, which is arranged at a prescribed distance from the first alignment system in the first direction and detects fiducial marks, calculating parts, which detect the fiducial marks and calculate the expansion/contraction of the substrate in the first direction or the transport speed of the substrate, and a processing part, which processes a prescribed position of the substrate based on at least one of the expansion/contraction of the substrate in the first direction or the transport speed of the substrate and the fiducial marks.
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