发明申请
US20150318296A1 NON-VOLATILE MEMORY DEVICES WITH VERTICALLY INTEGRATED CAPACITOR ELECTRODES
有权
具有垂直集成电容器电极的非易失性存储器件
- 专利标题: NON-VOLATILE MEMORY DEVICES WITH VERTICALLY INTEGRATED CAPACITOR ELECTRODES
- 专利标题(中): 具有垂直集成电容器电极的非易失性存储器件
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申请号: US14702038申请日: 2015-05-01
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公开(公告)号: US20150318296A1公开(公告)日: 2015-11-05
- 发明人: Hyun-suk Kim , Joon-hee Lee , Kee-jeong Rho
- 申请人: Hyun-suk Kim , Joon-hee Lee , Kee-jeong Rho
- 优先权: KR10-2014-0053620 20140502
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L49/02
摘要:
Provided is a vertical non-volatile memory device in which a capacitor constituting a peripheral circuit region is formed as a vertical type so that an area occupied by the capacitor in the entire device can be reduced as compared with a planar capacitor. Thus, a non-volatile memory device may be highly integrated and have a high capacity. The device includes a substrate having a cell region and a peripheral circuit region, a memory cell string including a plurality of vertical memory cells formed in the cell region and channel holes formed to penetrate the vertical memory cells in a first direction vertical to the substrate, an insulating layer formed in the peripheral circuit region on the substrates at substantially the same level as an upper surface of the memory cell string, and a plurality of capacitor electrodes formed on the peripheral circuit region to penetrate at least a portion of the insulating layer in the first direction, the plurality of capacitor electrodes extending parallel to the channel holes. The plurality of capacitor electrodes are spaced apart from one another in a second direction parallel to the substrate, and the insulating layer is interposed between a pair of adjacent capacitor electrodes from among the plurality of capacitor electrodes.
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