Invention Application
US20150323347A1 PIEZOELECTRIC ACTUATOR AND METHOD OF MEASURING MOTION BY USING THE SAME 审中-公开
压电致动器及其运动测量方法

PIEZOELECTRIC ACTUATOR AND METHOD OF MEASURING MOTION BY USING THE SAME
Abstract:
A piezoelectric actuator and a method of measuring a motion by using the piezoelectric actuator are provided. The piezoelectric actuator includes: a movable member that is disposed to face the fixed member; a piezoelectric element that is disposed between the fixed member and the movable member, and configured to operate in a shear mode based on input voltages applied to the piezoelectric element and move the movable member relative to the fixed member; and a position sensor that is disposed between the piezoelectric element and the movable member, and configured to measure a motion of the movable member.
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