发明申请
- 专利标题: MASK
- 专利标题(中): 面具
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申请号: US14546237申请日: 2014-11-18
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公开(公告)号: US20150336129A1公开(公告)日: 2015-11-26
- 发明人: Jian GUO
- 申请人: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
- 优先权: CN201410216482.4 20140521
- 主分类号: B05C21/00
- IPC分类号: B05C21/00
摘要:
The present invention provides a mask, on which a preset pattern is provided. First test patterns for determining an amount of a position offset of the mask during its movement are provided on the mask at a first side of the preset pattern and a second side of the preset pattern opposite to the first side, respectively. When being moved in a direction from the first side to the second side by a standard distance, the mask can determine whether a position offset occurs to the mask during its movement, and determine an amount of the position offset if a position offset occurs. Thus, the position offset of the mask can be corrected, thereby obtaining an accurate predetermined pattern on a glass substrate.
公开/授权文献
- US09409204B2 Mask 公开/授权日:2016-08-09
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