Invention Application
- Patent Title: THIN FILM TRANSISTOR, METHOD FOR FABRICATING THE SAME AND DISPLAY APPARATUS
- Patent Title (中): 薄膜晶体管,其制造方法和显示装置
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Application No.: US14409333Application Date: 2014-06-20
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Publication No.: US20150349140A1Publication Date: 2015-12-03
- Inventor: Meili WANG , Chunsheng JIANG , Dongfang WANG , Fengjuan LIU
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Priority: CN201310473410.3 20131011
- International Application: PCT/CN2014/080454 WO 20140620
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/32 ; H01L21/266 ; H01L21/02 ; H01L29/66 ; H01L21/265

Abstract:
Embodiments of the present invention provide a thin film transistor, method for fabricating the thin film transistor and display apparatus. The method includes steps of: forming an active layer pattern which has a mobility greater than a predetermined threshold from an active layer material; and performing ion implantation on the active layer pattern. The energy of a compound bond formed from the implanted ions is greater than that of a compound bond formed from ions in the active layer material, thereby reducing the chance of vacancy formation and reducing the carrier concentration. Therefore, the mobility of the active layer surface is reduced, the leakage current is reduced, the threshold voltage is adjusted to shift toward positive direction and performance of the thin film transistor is improved.
Public/Granted literature
- US09711653B2 Thin film transistor, method for fabricating the same and display apparatus Public/Granted day:2017-07-18
Information query
IPC分类: