Invention Application
US20150364292A1 STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLES MANUFACTURING METHOD
审中-公开
舞台装置，雕刻装置和制品制造方法
- Patent Title: STAGE APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLES MANUFACTURING METHOD
- Patent Title (中): 舞台装置，雕刻装置和制品制造方法
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Application No.: US14738508Application Date: 2015-06-12
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Publication No.: US20150364292A1Publication Date: 2015-12-17
- Inventor: Tomonori Ishikawa , Nobushige Korenaga
- Applicant: CANON KABUSHIKI KAISHA
- Priority: JP2014-124753 20140617
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/317
Abstract:
A stage apparatus including: a magnet; a moving member configured to be supported so as to float by a magnetic force of the magnet and move in a first direction along a horizontal plane together with the magnet; and a fixed member having a magnetic material facing the magnet above the magnet in a movable area of the moving member, wherein side surfaces of the magnet in the first direction are covered by using a first magnetic field blocking surface of the moving member and a second magnetic field blocking surface of the fixed member.
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