发明申请
- 专利标题: METHOD OF MAKING TRANSMISSION ELECTRON MICROSCOPE MICRO-GRID
- 专利标题(中): 制造传输电子显微镜微网的方法
-
申请号: US14738950申请日: 2015-06-15
-
公开(公告)号: US20150364293A1公开(公告)日: 2015-12-17
- 发明人: YANG WEI , SHOU-SHAN FAN
- 申请人: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
- 优先权: CN201410269131.X 20140617
- 主分类号: H01J37/20
- IPC分类号: H01J37/20 ; C25D7/00 ; C25D5/48 ; H01J37/26
摘要:
A method of making a transmission electron microscope micro-grid includes following steps. A carbon nanotube layer is provided, and the carbon nanotube layer includes a first surface and a second surface opposite to each other. A first metal layer is electroplated on the first surface and a second metal layer is electroplated on the second surface. A number of first through holes are formed by etching the first metal layer, and a number of second through holes are formed by etching the second metal layer, wherein the carbon nanotube layer is exposed through the number of first through holes and the number of second through holes.
公开/授权文献
信息查询