Invention Application
US20150364394A1 Method for Building Up a Fan-Out RDL Structure with Fine Pitch Line-Width and Line-Spacing
有权
建立具有细间距线宽和线间距的扇出式RDL结构的方法
- Patent Title: Method for Building Up a Fan-Out RDL Structure with Fine Pitch Line-Width and Line-Spacing
- Patent Title (中): 建立具有细间距线宽和线间距的扇出式RDL结构的方法
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Application No.: US14305640Application Date: 2014-06-16
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Publication No.: US20150364394A1Publication Date: 2015-12-17
- Inventor: Yaojian Lin
- Applicant: STATS ChipPAC, Ltd.
- Main IPC: H01L23/31
- IPC: H01L23/31 ; H01L21/56 ; H01L23/00 ; H01L23/48

Abstract:
A semiconductor device has a semiconductor die and an encapsulant deposited over the semiconductor die. A first insulating layer is formed over a first surface of the encapsulant and an active surface of the semiconductor die. A second insulating layer is formed over a second surface of the encapsulant opposite the first surface. A conductive layer is formed over the first insulating layer. The conductive layer includes a line-pitch or line-spacing of less than 5 μm. The active surface of the semiconductor die is recessed within the encapsulant. A third insulating layer is formed over the semiconductor die including a surface of the third insulating layer coplanar with a surface of the encapsulant. The second insulating layer is formed prior to forming the conductive layer. A trench is formed in the first insulating layer. The conductive layer is formed within the trench.
Public/Granted literature
- US09978700B2 Method for building up a fan-out RDL structure with fine pitch line-width and line-spacing Public/Granted day:2018-05-22
Information query
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