Invention Application
- Patent Title: SELF-ALIGNED FLOATING GATE IN A VERTICAL MEMORY STRUCTURE
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Application No.: US14835922Application Date: 2015-08-26
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Publication No.: US20150364486A1Publication Date: 2015-12-17
- Inventor: Randy J. Koval
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/788 ; H01L29/49 ; H01L29/04 ; H01L29/16

Abstract:
A memory device or electronic system may include a memory cell body extending from a substrate, a self-aligned floating gate separated from the memory cell body by a tunneling dielectric film, and a control gate separated from the self-aligned floating gate by a blocking dielectric film. The floating gate is flanked by the memory cell body and the control gate to form a memory cell, and the self-aligned floating gate is at least as thick as the control gate. Methods for building such a memory device are also disclosed.
Public/Granted literature
- US09443864B2 Self-aligned floating gate in a vertical memory structure Public/Granted day:2016-09-13
Information query
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