Invention Application
US20150364691A1 INFRARED DETECTOR WITH SWNT-BASED DOUBLE-CANTILEVER AND MANUFACTURE THEREOF
审中-公开
基于SWNT的双通道红外探测器及其制造
- Patent Title: INFRARED DETECTOR WITH SWNT-BASED DOUBLE-CANTILEVER AND MANUFACTURE THEREOF
- Patent Title (中): 基于SWNT的双通道红外探测器及其制造
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Application No.: US14732830Application Date: 2015-06-08
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Publication No.: US20150364691A1Publication Date: 2015-12-17
- Inventor: Fei Wang , Shaoda Zhang
- Applicant: South University of Science and Technology of China
- Priority: CN201410262035.2 20140612
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/44

Abstract:
A double-cantilever infrared detector based on single walled carbon nanotube and the manufacture method thereof are provided. The detector comprises: a substrate having a detection window extending through the substrate from the top surface to the bottom surface; two heterogeneous cantilevers, wherein each cantilever is located on the substrate and has a fixed end connected to the substrate and a free end suspended above the detection window; a single walled carbon nanotube film bridged between the two free ends of the two heterogeneous composite cantilevers, wherein the heterogeneous cantilevers include a first material layer and a second material layer located thereon, and the first material layer and the second material layer have different thermal expansion coefficients.
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