发明申请
- 专利标题: FILM EDGE DETECTING METHOD AND FILM EDGE DETECTING DEVICE
- 专利标题(中): 薄膜边缘检测方法和薄膜边缘检测装置
-
申请号: US14548997申请日: 2014-11-20
-
公开(公告)号: US20150369748A1公开(公告)日: 2015-12-24
- 发明人: Shoukun WANG , Huibin GUO , Yuchun FENG , Liangliang LI , Xiaoxiang ZHANG , Zongjie GUO
- 申请人: BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- 优先权: CN201410287383.5 20140624
- 主分类号: G01N21/84
- IPC分类号: G01N21/84
摘要:
The present invention provides a film edge detecting method and a film edge detecting device. The film edge detecting method is used for detecting a film edge of a film layer formed on a substrate, the film layer comprises a patterned film layer, the method includes: forming at least one scale pattern in the patterned film layer, a film edge of the patterned film layer corresponding to an edge of the scale pattern; obtaining a patterned film edge indication value of the edge of the scale pattern; and obtaining a second distance, which is a distance between the film edge of the non-patterned film layer and a corresponding edge of the substrate, based on the non-patterned film edge indication value and a preset reference value of the corresponding edge of the substrate.
公开/授权文献
- US09410897B2 Film edge detecting method and film edge detecting device 公开/授权日:2016-08-09
信息查询