Invention Application
US20150372100A1 INTEGRATED CIRCUITS HAVING IMPROVED CONTACTS AND METHODS FOR FABRICATING SAME
审中-公开
具有改进联系的集成电路及其制造方法
- Patent Title: INTEGRATED CIRCUITS HAVING IMPROVED CONTACTS AND METHODS FOR FABRICATING SAME
- Patent Title (中): 具有改进联系的集成电路及其制造方法
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Application No.: US14309586Application Date: 2014-06-19
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Publication No.: US20150372100A1Publication Date: 2015-12-24
- Inventor: Gerd Zschätzsch , Stefan Flachowsky , Jan Hoentschel
- Applicant: GLOBALFOUNDRIES, Inc.
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/78 ; H01L29/417

Abstract:
Integrated circuits having improved contacts and improved methods for fabricating integrated circuits having contacts are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate with a source/drain region. The method deposits an interlayer dielectric material over the semiconductor substrate. Further, the method etches the interlayer dielectric material to form a hole defining an exposed portion of the source/drain region. The method includes forming a contact forming a contact in the hole over the exposed portion of the source/drain region and forming an interconnect in the hole over the contact.
Information query
IPC分类: