Invention Application
US20150372100A1 INTEGRATED CIRCUITS HAVING IMPROVED CONTACTS AND METHODS FOR FABRICATING SAME 审中-公开
具有改进联系的集成电路及其制造方法

INTEGRATED CIRCUITS HAVING IMPROVED CONTACTS AND METHODS FOR FABRICATING SAME
Abstract:
Integrated circuits having improved contacts and improved methods for fabricating integrated circuits having contacts are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate with a source/drain region. The method deposits an interlayer dielectric material over the semiconductor substrate. Further, the method etches the interlayer dielectric material to form a hole defining an exposed portion of the source/drain region. The method includes forming a contact forming a contact in the hole over the exposed portion of the source/drain region and forming an interconnect in the hole over the contact.
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