发明申请
- 专利标题： MICRO-ELECTRO-MECHANICAL DEVICE WITH COMPENSATION OF ERRORS DUE TO DISTURBANCE FORCES, SUCH AS QUADRATURE COMPONENTS
- 专利标题（中）： 微机电装置补偿由于干扰力等因素造成的错误，如作为平衡部件
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申请号： US14750840申请日： 2015-06-25
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公开(公告)号： US20150377624A1公开(公告)日： 2015-12-31
- 发明人: Luca Giuseppe Falorni , Carlo Valzasina , Roberto Carminati , Alessandro Tocchio
- 申请人： STMICROELECTRONICS, S.R.L.
- 优先权： ITTO2014A000522 20140630
- 主分类号： G01C19/5712
- IPC分类号： G01C19/5712
摘要：
MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.
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