发明申请
- 专利标题: ELECTROMECHANICAL TRANSDUCER, LIQUID DROPLET DISCHARGE HEAD, AND IMAGE FORMING APPARATUS
- 专利标题(中): 机电传感器,液体放电头和图像形成装置
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申请号: US14748517申请日: 2015-06-24
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公开(公告)号: US20160001556A1公开(公告)日: 2016-01-07
- 发明人: Toshiaki Masuda , Keishi Miwa
- 申请人: Toshiaki Masuda , Keishi Miwa
- 申请人地址: JP Tokyo
- 专利权人: RICOH COMPANY, LTD.
- 当前专利权人: RICOH COMPANY, LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2014-136980 20140702
- 主分类号: B41J2/14
- IPC分类号: B41J2/14 ; H01L41/047
摘要:
An electromechanical transducer includes a substrate; a diaphragm formed on the substrate; and a piezoelectric element that includes a lower electrode; a piezoelectric member; and an upper electrode, in which a lower electrode film to form the lower electrode, a piezoelectric film to form the piezoelectric member, and an upper electrode film to form the upper electrode are laminated in layers on the diaphragm formed on the substrate. The piezoelectric element is formed such that the lower electrode film, the piezoelectric member film, and the upper electrode film are patterned to form the lower electrode, the piezoelectric member, and the upper electrode, each of which has a desired pattern; and corners of the lower electrode are rounded.
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