Invention Application
- Patent Title: SURFACE DEFECT REPAIR BY IRRADIATION
- Patent Title (中): 表面缺损修复由辐射
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Application No.: US14767263Application Date: 2014-02-17
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Publication No.: US20160004151A1Publication Date: 2016-01-07
- Inventor: Sergey Oshemkov
- Applicant: CARL ZEISS SMS LTD
- International Application: PCT/IL2014/050169 WO 20140217
- Main IPC: G03F1/72
- IPC: G03F1/72
Abstract:
A method for repairing a defect on a substrate surface includes placing on the defect a nanoparticle that includes a conductive material. A region of the substrate surface in which the nanoparticle is placed is irradiated, the region being larger than the nanoparticle. An energy density of the irradiation is below a modification threshold for the substrate surface.
Public/Granted literature
- US09690191B2 Surface defect repair by irradiation Public/Granted day:2017-06-27
Information query
