发明申请
US20160005588A1 Plasma Light Source, Inspection Apparatus Including Plasma Light Source, and Method of Generating Plasma Light
有权
等离子体光源，包括等离子体光源的检测装置和等离子体光的产生方法
- 专利标题： Plasma Light Source, Inspection Apparatus Including Plasma Light Source, and Method of Generating Plasma Light
- 专利标题（中）： 等离子体光源，包括等离子体光源的检测装置和等离子体光的产生方法
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申请号： US14613988申请日： 2015-02-04
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公开(公告)号： US20160005588A1公开(公告)日： 2016-01-07
- 发明人: Young-kyu Park , Wook-rae Kim , Kwang-soo Kim , Tae-joong Kim , Byeong-hwan Jeon
- 申请人： Young-kyu Park , Wook-rae Kim , Kwang-soo Kim , Tae-joong Kim , Byeong-hwan Jeon
- 优先权： KR10-2014-0081983 20140701
- 主分类号： H01J65/04
- IPC分类号： H01J65/04 ; G02B27/14
摘要：
A plasma light source includes a chamber having an ionizable medium therein, an ignition source configured to provide first electromagnetic radiation to the chamber, a sustaining source configured to separately provide second electromagnetic radiation to the chamber, a first curved mirror positioned adjacent the chamber, and a second curved mirror positioned opposite the first mirror and arranged to direct the first electromagnetic radiation toward the chamber. The second electromagnetic radiation may be different than the first electromagnetic radiation. Related devices and methods of operation are also discussed.