Invention Application
- Patent Title: Three-Dimensional Fine Movement Device
- Patent Title (中): 三维精细运动装置
-
Application No.: US14794968Application Date: 2015-07-09
-
Publication No.: US20160011231A1Publication Date: 2016-01-14
- Inventor: Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe
- Applicant: Hitachi High-Tech Science Corporation
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2014-141057 20140709
- Main IPC: G01Q10/04
- IPC: G01Q10/04

Abstract:
A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.
Public/Granted literature
- US10161958B2 Three-dimensional fine movement device Public/Granted day:2018-12-25
Information query