发明申请
- 专利标题： MASK AND MANUFACTURING METHOD THEREOF
- 专利标题（中）： 其掩蔽和制造方法
-
申请号： US14428940申请日： 2014-07-31
-
公开(公告)号： US20160011503A1公开(公告)日： 2016-01-14
- 发明人: Zhiyi SUN , Ran ZHANG
- 申请人： BOE TECHNOLOGY GROUP CO., LTD. , BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- 优先权： CN201310421535.1 20130916
- 国际申请： PCT/CN2014/083407 WO 20140731
- 主分类号： G03F1/48
- IPC分类号： G03F1/48
摘要：
A mask and a manufacturing method thereof are provided. The mask comprises a body and a film layer comprising an oleophobic material and covering the surface of the body, thereby the possibility of the organic coagulation adhering to the surface of the mask is effectively reduced, and the contamination of the mask by the organic solvent and other volatile organic in the photoresist during exposure is also reduced.
公开/授权文献
- US09482941B2 Mask and manufacturing method thereof 公开/授权日：2016-11-01
信息查询
