Invention Application
US20160013621A1 DISTRIBUTED FEEDBACK LASER DIODE ARRAY AND METHOD OF MANUFACTURING SAME 审中-公开
分布式反馈激光二极管阵列及其制造方法

DISTRIBUTED FEEDBACK LASER DIODE ARRAY AND METHOD OF MANUFACTURING SAME
Abstract:
Provided is a method of manufacturing a distributed feedback laser diode array (DFB-LDA) including: forming active layers corresponding to a plurality of channels using electron beam lithography; forming a plurality of mask patterns between the active layers; and growing the active layers using electron beam lithography, wherein the opening widths of the plurality of mask patterns corresponding to the plurality of channels are different from one another.
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