Invention Application
US20160013621A1 DISTRIBUTED FEEDBACK LASER DIODE ARRAY AND METHOD OF MANUFACTURING SAME
审中-公开
分布式反馈激光二极管阵列及其制造方法
- Patent Title: DISTRIBUTED FEEDBACK LASER DIODE ARRAY AND METHOD OF MANUFACTURING SAME
- Patent Title (中): 分布式反馈激光二极管阵列及其制造方法
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Application No.: US14608385Application Date: 2015-01-29
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Publication No.: US20160013621A1Publication Date: 2016-01-14
- Inventor: Young Ahn LEEM , Kisoo KIM , Oh Kee KWON , Young-Tak Han
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2014-0085977 20140709
- Main IPC: H01S5/40
- IPC: H01S5/40 ; H01S5/12 ; H01S5/028 ; H01S5/343

Abstract:
Provided is a method of manufacturing a distributed feedback laser diode array (DFB-LDA) including: forming active layers corresponding to a plurality of channels using electron beam lithography; forming a plurality of mask patterns between the active layers; and growing the active layers using electron beam lithography, wherein the opening widths of the plurality of mask patterns corresponding to the plurality of channels are different from one another.
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