发明申请
- 专利标题: 4D DEVICE, PROCESS AND STRUCTURE
- 专利标题(中): 4D设备,过程和结构
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申请号: US14858065申请日: 2015-09-18
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公开(公告)号: US20160027760A1公开(公告)日: 2016-01-28
- 发明人: Roy R. YU , Wilfried HAENSCH
- 申请人: Internatonal Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: Internatonal Business Machines Corporation
- 当前专利权人: Internatonal Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L25/065
- IPC分类号: H01L25/065 ; H01L23/48 ; H01L23/00 ; H01L25/18
摘要:
A 4D device comprises a 2D multi-core logic and a 3D memory stack connected through the memory stack sidewall using a fine pitch T&J connection. The 3D memory in the stack is thinned from the original wafer thickness to no remaining Si. A tongue and groove device at the memory wafer top and bottom surfaces allows an accurate stack alignment. The memory stack also has micro-channels on the backside to allow fluid cooling. The memory stack is further diced at the fixed clock-cycle distance and is flipped on its side and re-assembled on to a template into a pseudo-wafer format. The top side wall of the assembly is polished and built with BEOL to fan-out and use the T&J fine pitch connection to join to the 2D logic wafer. The other side of the memory stack is polished, fanned-out, and bumped with C4 solder. The invention also comprises a process for manufacturing the device. In another aspect, the invention comprises a 4D process and device for over 50× greater than 2D memory density per die and an ultra high density memory.
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