Invention Application
US20160027952A1 Pin Diode and Manufacturing Method Thereof, and X-Ray Detector Using Pin Diode and Manufacturing Method Thereof 有权
引脚二极管及其制造方法,以及使用引脚二极管的X射线检测器及其制造方法

  • Patent Title: Pin Diode and Manufacturing Method Thereof, and X-Ray Detector Using Pin Diode and Manufacturing Method Thereof
  • Patent Title (中): 引脚二极管及其制造方法,以及使用引脚二极管的X射线检测器及其制造方法
  • Application No.: US14806844
    Application Date: 2015-07-23
  • Publication No.: US20160027952A1
    Publication Date: 2016-01-28
  • Inventor: Sung Jin Choi
  • Applicant: Hydis Technologies Co., Ltd.
  • Priority: KR10-2014-0094134 20140724
  • Main IPC: H01L31/18
  • IPC: H01L31/18 H01L31/115
Pin Diode and Manufacturing Method Thereof, and X-Ray Detector Using Pin Diode and Manufacturing Method Thereof
Abstract:
Provided herein is a PIN diode, a manufacturing method thereof, an x-ray detector using the PIN diode, and a manufacturing method thereof, the PIN diode manufacturing method according to an embodiment of the present disclosure including forming a lower electrode layer, and forming a lower electrode by etching the lower electrode layer; depositing a PIN layer for formation of a PIN structure above the lower electrode, and depositing an upper electrode layer for formation of the upper electrode above the PIN layer; forming a photo resist pattern above the upper electrode layer, and forming the upper electrode by etching the upper electrode layer having the photo resist pattern as a mask; forming the PIN structure by etching the PIN layer; etching an edge area of the upper electrode having the photo resist pattern as a mask; and removing the photo resist pattern.
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