Invention Application
US20160031056A1 Method of fault detection and classification (FDC) for improved tool control capabilities
审中-公开
故障检测和分类方法（FDC），用于提高刀具控制能力
- Patent Title: Method of fault detection and classification (FDC) for improved tool control capabilities
- Patent Title (中): 故障检测和分类方法（FDC），用于提高刀具控制能力
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Application No.: US14451406Application Date: 2014-08-04
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Publication No.: US20160031056A1Publication Date: 2016-02-04
- Inventor: Feng-Chi Chung , Ching-Hsing Hsieh , Chen-Hui Huang , Hsin-Kun Chu
- Applicant: UNITED MICROELECTRONICS CORP.
- Main IPC: B23Q15/28
- IPC: B23Q15/28
Abstract:
A method of a fault detection and classification (FDC) may be used to determine outlier tools from a plurality of tools. The method includes generating a plurality of parameter charts, generating a plurality of group charts according to the plurality of parameter charts, generating a score table according to the plurality of group charts, determining outlier tools according to the score table, and performing tool correction on the outlier tools.
Information query
