Invention Application
US20160040985A1 SPECIMEN MEASURING DEVICE AND COMPUTER PROGRAM PRODUCT 有权
样本测量设备和计算机程序产品

SPECIMEN MEASURING DEVICE AND COMPUTER PROGRAM PRODUCT
Abstract:
A specimen measuring device includes: a light source device that irradiates a specimen surface of a specimen with illumination light from multiple illumination units at a plurality of illumination angles; a spectral camera device that is arranged above the specimen surface, spectrally separates reflected light from the specimen surface, and acquires 2D spectral information through a single image capturing operation; and a calculating unit that calculates deflection angle spectral information of the specimen surface used to measure a measurement value of a certain evaluation item of the specimen using a change in an optical geometrical condition of an illumination direction and an image capturing direction between pixels in an X axis direction and a Y axis direction of the spectral information.
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