Invention Application
- Patent Title: SPECIMEN MEASURING DEVICE AND COMPUTER PROGRAM PRODUCT
- Patent Title (中): 样本测量设备和计算机程序产品
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Application No.: US14816374Application Date: 2015-08-03
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Publication No.: US20160040985A1Publication Date: 2016-02-11
- Inventor: Sho NAGAI , Kensuke Masuda , Go Maruyama , Yuji Yamanaka , Naohiro Kamijo , Kenji Kagitani
- Applicant: Sho NAGAI , Kensuke Masuda , Go Maruyama , Yuji Yamanaka , Naohiro Kamijo , Kenji Kagitani
- Priority: JP2014-159917 20140805
- Main IPC: G01B11/30
- IPC: G01B11/30 ; G01J3/14 ; G01J3/18

Abstract:
A specimen measuring device includes: a light source device that irradiates a specimen surface of a specimen with illumination light from multiple illumination units at a plurality of illumination angles; a spectral camera device that is arranged above the specimen surface, spectrally separates reflected light from the specimen surface, and acquires 2D spectral information through a single image capturing operation; and a calculating unit that calculates deflection angle spectral information of the specimen surface used to measure a measurement value of a certain evaluation item of the specimen using a change in an optical geometrical condition of an illumination direction and an image capturing direction between pixels in an X axis direction and a Y axis direction of the spectral information.
Public/Granted literature
- US09958265B2 Specimen measuring device and computer program product Public/Granted day:2018-05-01
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