Invention Application
US20160041465A1 PATTERN FORMING METHOD, ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, RESIST FILM, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE 有权
图案形成方法,主动感光或辐射敏感性树脂组合物,电阻膜,制造电子器件的方法和电子器件

  • Patent Title: PATTERN FORMING METHOD, ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, RESIST FILM, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
  • Patent Title (中): 图案形成方法,主动感光或辐射敏感性树脂组合物,电阻膜,制造电子器件的方法和电子器件
  • Application No.: US14881400
    Application Date: 2015-10-13
  • Publication No.: US20160041465A1
    Publication Date: 2016-02-11
  • Inventor: Hiroo TAKIZAWAShuji HIRANONatsumi YOKOKAWAWataru NIHASHI
  • Applicant: FUJIFILM Corporation
  • Applicant Address: JP Tokyo
  • Assignee: FUJIFILM Corporation
  • Current Assignee: FUJIFILM Corporation
  • Current Assignee Address: JP Tokyo
  • Priority: JP2013-097187 20130502; JP2014-076865 20140403
  • Main IPC: G03F7/038
  • IPC: G03F7/038 G03F7/32 G03F7/20
PATTERN FORMING METHOD, ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, RESIST FILM, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
Abstract:
The pattern forming method includes (1) forming a film using an active light sensitive or radiation sensitive resin composition, (2) exposing the film to active light or radiation, and (3) developing the exposed film using a developer including an organic solvent, in which the active light sensitive or radiation sensitive resin composition contains a resin (A) having a group which generates a polar group by being decomposed due to the action of an acid, the resin (A) has a phenolic hydroxyl group and/or a phenolic hydroxyl group protected with a group leaving due to the action of an acid, and the developer including the organic solvent contains an additive which forms at least one interaction of an ionic bond, a hydrogen bond, a chemical bond, and a dipole interaction, with the polar group.
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