Invention Application
- Patent Title: SOLDER BUMP SEALING METHOD AND DEVICE
- Patent Title (中): 焊膏密封方法和装置
-
Application No.: US14456972Application Date: 2014-08-11
-
Publication No.: US20160042902A1Publication Date: 2016-02-11
- Inventor: Benedikt ZEYEN , Vikram PATIL
- Applicant: Innovative Micro Technology
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Main IPC: H01H59/00
- IPC: H01H59/00 ; H01H49/00

Abstract:
A method for forming a cavity in a microfabricated structure, includes the sealing of that cavity with a low temperature solder. The method may include forming a sacrificial layer over a substrate, forming a flexible membrane over the sacrificial layer, forming a release hole through a flexible membrane to the sacrificial layer, introducing an etchant through the release hole to remove the sacrificial layer, and then sealing that release hole with a low temperature solder.
Public/Granted literature
- US09330874B2 Solder bump sealing method and device Public/Granted day:2016-05-03
Information query