Invention Application
US20160042902A1 SOLDER BUMP SEALING METHOD AND DEVICE 有权
焊膏密封方法和装置

SOLDER BUMP SEALING METHOD AND DEVICE
Abstract:
A method for forming a cavity in a microfabricated structure, includes the sealing of that cavity with a low temperature solder. The method may include forming a sacrificial layer over a substrate, forming a flexible membrane over the sacrificial layer, forming a release hole through a flexible membrane to the sacrificial layer, introducing an etchant through the release hole to remove the sacrificial layer, and then sealing that release hole with a low temperature solder.
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