发明申请
US20160049441A1 FLEXIBLE APS X-RAY IMAGER WITH MOTFT PIXEL READOUT AND A PIN DIODE SENSING ELEMENT 有权
柔性APS X射线成像器,具有单像素读出和PIN二极管感应元件

  • 专利标题: FLEXIBLE APS X-RAY IMAGER WITH MOTFT PIXEL READOUT AND A PIN DIODE SENSING ELEMENT
  • 专利标题(中): 柔性APS X射线成像器,具有单像素读出和PIN二极管感应元件
  • 申请号: US14460054
    申请日: 2014-08-14
  • 公开(公告)号: US20160049441A1
    公开(公告)日: 2016-02-18
  • 发明人: Chan-Long ShiehGang Yu
  • 申请人: Chan-Long ShiehGang Yu
  • 主分类号: H01L27/146
  • IPC分类号: H01L27/146
FLEXIBLE APS X-RAY IMAGER WITH MOTFT PIXEL READOUT AND A PIN DIODE SENSING ELEMENT
摘要:
A method of fabricating an X-ray imager including the steps of forming an etch stop layer on a glass substrate and depositing a stack of semiconductor layers on the etch stop layer to form a sensor plane. Separating the stack into an array of PIN photodiodes. Depositing a layer of insulating material on the array to form a planarized surface and forming vias through the insulating layer into communication with an upper surface of each photodiode and forming metal contacts on the planarized surface through the vias in contact with each photodiode. Fabricating an array of MOTFTs in an active pixel sensor configuration backplane on the planarized surface and in electrical communication with the contacts, to provide a sensor plane/MOTFT backplane interconnected combination. Attaching a flexible support carrier to the MOTFT backplane and removing the glass substrate. A scintillator is then laminated on the array of photodiodes.
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