Invention Application
- Patent Title: ENERGY BEAM SIZE VERIFICATION
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Application No.: US14750779Application Date: 2015-06-25
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Publication No.: US20160054121A1Publication Date: 2016-02-25
- Inventor: Anders Snis
- Applicant: Arcam AB
- Main IPC: G01B15/00
- IPC: G01B15/00 ; G01B11/00

Abstract:
A method for verifying a size of an energy beam spot, said method comprising the steps of providing a first beam spot having a predetermined size and power at a first position on a work piece, varying a focus and/or astigmatism lens setting for said first beam spot until max intensity for the beam spot is detected, comparing the detected settings of said focus lens and/or astigmatism lens for said maximum intensity of the beam spot with stored settings of said focus lens and/or astigmatism lens for the beam spot with said predetermined size and power, repeating step a-c for different predetermined beam powers, repeating step a-d for different positions on said work piece, wherein said beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.
Public/Granted literature
- US09347770B2 Energy beam size verification Public/Granted day:2016-05-24
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