• Patent Title: ENERGY BEAM SIZE VERIFICATION
  • Application No.: US14750779
    Application Date: 2015-06-25
  • Publication No.: US20160054121A1
    Publication Date: 2016-02-25
  • Inventor: Anders Snis
  • Applicant: Arcam AB
  • Main IPC: G01B15/00
  • IPC: G01B15/00 G01B11/00
ENERGY BEAM SIZE VERIFICATION
Abstract:
A method for verifying a size of an energy beam spot, said method comprising the steps of providing a first beam spot having a predetermined size and power at a first position on a work piece, varying a focus and/or astigmatism lens setting for said first beam spot until max intensity for the beam spot is detected, comparing the detected settings of said focus lens and/or astigmatism lens for said maximum intensity of the beam spot with stored settings of said focus lens and/or astigmatism lens for the beam spot with said predetermined size and power, repeating step a-c for different predetermined beam powers, repeating step a-d for different positions on said work piece, wherein said beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.
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