Invention Application
US20160056012A1 SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD
有权
用于扫描电子显微镜，扫描电子显微镜图像观察系统和扫描电子显微镜图像观察方法的样品架
- Patent Title: SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD
- Patent Title (中): 用于扫描电子显微镜，扫描电子显微镜图像观察系统和扫描电子显微镜图像观察方法的样品架
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Application No.: US14783310Application Date: 2014-03-24
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Publication No.: US20160056012A1Publication Date: 2016-02-25
- Inventor: Toshihiko OGURA
- Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Applicant Address: JP Chiyoda-ku, Tokyo
- Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Current Assignee Address: JP Chiyoda-ku, Tokyo
- Priority: JP2013-080490 20130408
- International Application: PCT/JP2014/001668 WO 20140324
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/22 ; H01J37/28
Abstract:
A water solution in which an observation sample is, for example, dissolved is sandwiched on a first insulative thin film side provided under a conductive thin film. When an electron beam incident part is charged minus, electric dipoles of water molecules are arrayed along a potential gradient. Electric charges are also generated on the surface of a second insulative thin film. The electric charges are detected by a terminal section and changes to a measurement signal. In a state in which an electron beam is blocked, the minus potential disappears. Consequently, the electric charges on the surface of the first insulative thin film also disappear, and the measurement signal output from the terminal section changes to 0.
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