Invention Application
- Patent Title: FIN FET AND METHOD OF FABRICATING SAME
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Application No.: US14931490Application Date: 2015-11-03
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Publication No.: US20160056296A1Publication Date: 2016-02-25
- Inventor: Keun-Nam Kim , Hung-Mo YANG , Choong-Ho LEE
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2004-0007426 20040205
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423

Abstract:
A fin field effect transistor (fin FET) is formed using a bulk silicon substrate and sufficiently guarantees a top channel length formed under a gate, by forming a recess having a predetermined depth in a fin active region and then by forming the gate in an upper part of the recess. A device isolation film is formed to define a non-active region and a fin active region in a predetermined region of the substrate. In a portion of the device isolation film a first recess is formed, and in a portion of the fin active region a second recess having a depth shallower than the first recess is formed. A gate insulation layer is formed within the second recess, and a gate is formed in an upper part of the second recess. A source/drain region is formed in the fin active region of both sides of a gate electrode.
Public/Granted literature
- US09640665B2 Fin FET and method of fabricating same Public/Granted day:2017-05-02
Information query
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