Invention Application
US20160064344A1 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD 有权
半导体器件及其制造方法

  • Patent Title: SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
  • Patent Title (中): 半导体器件及其制造方法
  • Application No.: US14836688
    Application Date: 2015-08-26
  • Publication No.: US20160064344A1
    Publication Date: 2016-03-03
  • Inventor: Akira YAJIMA
  • Applicant: Renesas Electronics Corporation
  • Priority: JP2014-173454 20140828
  • Main IPC: H01L23/00
  • IPC: H01L23/00
SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
Abstract:
The present invention makes it possible to: reduce the manufacturing cost of a semiconductor device having a redistribution layer; and further improve the reliability of a semiconductor device having a redistribution layer.A feature point of First Embodiment is that an opening and a redistribution layer gutter are formed integrally in a polyimide resin film of a single layer as shown in FIG. 5. It is thereby possible to: form a redistribution layer in the polyimide resin film of a single layer; and hence inhibit a wiring material (silver) including the redistribution layer from migrating.
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