Invention Application
- Patent Title: SIZE-CONTROLLABLE OPENING AND METHOD OF MAKING SAME
-
Application No.: US14938432Application Date: 2015-11-11
-
Publication No.: US20160064647A1Publication Date: 2016-03-03
- Inventor: John Hongguang Zhang
- Applicant: STMICROELECTRONICS, INC.
- Applicant Address: US TX Coppell
- Assignee: STMICROELECTRONICS, INC.
- Current Assignee: STMICROELECTRONICS, INC.
- Current Assignee Address: US TX Coppell
- Main IPC: H01L41/332
- IPC: H01L41/332

Abstract:
A support structure includes an internal cavity. An elastic membrane extends to divide the internal cavity into a first chamber and a second chamber. The elastic membrane includes a nanometric-sized pin hole extending there through to interconnect the first chamber to the second chamber. The elastic membrane is formed of a first electrode film and a second electrode film separated by a piezo insulating film. Electrical connection leads are provided to support application of a bias current to the first and second electrode films of the elastic membrane. In response to an applied bias current, the elastic membrane deforms by bending in a direction towards one of the first and second chambers so as to produce an increase in a diameter of the pin hole.
Public/Granted literature
- US09818930B2 Size-controllable opening and method of making same Public/Granted day:2017-11-14
Information query
IPC分类: