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发明申请
US20160069685A1 PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY 有权
物理量传感器元件，物理量传感器，电子设备和可移动体

  • 专利标题： PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY
  • 专利标题（中）： 物理量传感器元件，物理量传感器，电子设备和可移动体
  • 申请号： US14844639
    申请日： 2015-09-03
  • 公开(公告)号： US20160069685A1
    公开(公告)日： 2016-03-10
  • 发明人: Makoto FURUHATA
  • 申请人： Seiko Epson Corporation
  • 优先权： JP2014-181047 20140905
  • 主分类号： G01C19/5705
  • IPC分类号： G01C19/5705
PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY
摘要：
A physical quantity sensor element is provided with a detecting portion, a driving portion, a beam portion which connects a detecting portion and the driving portion to each other, and in which the beam portion includes a branched portion. The beam portion includes two mass portion side beam portions which extend from two position of the driving portion, which are different from each other, and two supporting portion side beam portions which extend from two positions of the detecting portion, which are different from each other, and in which both end portions on the detecting portion side of two mass portion side beam portions are connected to each other, and both end portions on the driving portion side of two supporting portion side beam portions are connected to each other.
摘要（中）：

物理量传感器元件设置有检测部分，驱动部分，将检测部分和驱动部分彼此连接的梁部分，并且梁部分包括分支部分。 梁部分包括从驱动部分的彼此不同的两个位置延伸的两个质量部分侧梁部分和从检测部分的彼此不同的两个位置延伸的两个支撑部分侧梁部分 并且其中两个质量部分侧梁部分的检测部分侧上的两个端部彼此连接，并且两个支撑部分侧梁部分的驱动部分侧上的两个端部彼此连接。

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