Invention Application
- Patent Title: ELECTRODE STRUCTURE, METHOD OF FABRICATING THE SAME, AND SEMICONDUCTOR DEVICE INCLUDING THE ELECTRODE STRUCTURE
- Patent Title (中): 电极结构,其制造方法以及包括电极结构的半导体器件
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Application No.: US14940785Application Date: 2015-11-13
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Publication No.: US20160071946A1Publication Date: 2016-03-10
- Inventor: Dong-Kak Lee , Joon Kim , Bong-hyun Kim , Han-Jin Lim
- Applicant: Dong-Kak Lee , Joon Kim , Bong-hyun Kim , Han-Jin Lim
- Priority: KR10-2010-0063871 20100702
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L27/108 ; H01L29/423 ; H01L27/092

Abstract:
An electrode structure is disclosed. The electrode structure includes a first polysilicon layer doped with resistance adjustment impurities; a second polysilicon layer for adjusting grains, formed in the first polysilicon layer and doped with grain adjustment impurities; an ohmic metal layer formed on the first and second polysilicon layers; a barrier metal layer formed on the ohmic metal layer; and a metal layer formed on the barrier metal layer.
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