Invention Application
- Patent Title: MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN FILMS
- Patent Title (中): 测量薄膜厚度的测量探头
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Application No.: US14786218Application Date: 2014-04-24
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Publication No.: US20160076871A1Publication Date: 2016-03-17
- Inventor: Werner Volz
- Applicant: HELMUT FISCHER GMBH INSTITUT FÜR ELEKTRONIK UND MESSTECHNIK
- Priority: DE10201310425.1 20130426
- International Application: PCT/EP2014/058367 WO 20140424
- Main IPC: G01B7/06
- IPC: G01B7/06

Abstract:
The invention relates to a measuring probe for measuring the thickness of thin films, comprising a housing (12) and at least one sensor element (14, 15), which is supported resiliently with respect to the housing (12) by means of at least one spring element (33, 37) and has a contacting spherical cap (31) pointing opposite the contacting direction and along the longitudinal axis (38) of the sensor element toward the measurement surface (25) of a measurement object (26), wherein a damping device (17) is provided on the housing (12), which damping device acts in the contacting direction (28) of the at least one sensor element (14, 15) before the sensor element (14, 15) contacts the measurement surface (25) of the measurement object (26) and damps the contacting motion of the at least one sensor element (14, 15) in the direction toward the measurement surface (25) of the measurement object (26).
Public/Granted literature
- US10060718B2 Measuring probe with attenuating device for measuring the thickness of thin films Public/Granted day:2018-08-28
Information query