- 专利标题: INTEGRATED TRANSDUCER PROVIDED WITH A TEMPERATURE SENSOR AND METHOD FOR SENSING A TEMPERATURE OF THE TRANSDUCER
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申请号: US14950832申请日: 2015-11-24
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公开(公告)号: US20160076962A1公开(公告)日: 2016-03-17
- 发明人: Lorenzo Baldo , Michele Vaiana , Mario Chiricosta , Mario Maiore , Paul Georges Marie Rose
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 优先权: ITTO2012A000145 20120217
- 主分类号: G01L19/00
- IPC分类号: G01L19/00 ; G01L9/00 ; G01K7/01
摘要:
A pressure sensor includes a body made of semiconductor material having a first type of conductivity and a pressure-sensitive structure having the first type of conductivity defining a suspended membrane. One or more piezoresistive elements having a second type of conductivity (P) are formed in the suspended membrane. The piezoresistive elements form, with the pressure-sensitive structure, respective junction diodes. A temperature sensing method includes: generating a first current between conduction terminals common to the junction diodes; detecting a first voltage value between the common conduction terminals when the first current is supplied; and correlating the detected first voltage value to a value of temperature of the diodes. The temperature value thus calculated can be used for correcting the voltage signal generated at output by the pressure sensor when the latter is operated for sensing an applied outside pressure which deforms the suspended membrane.