发明申请
- 专利标题: METHOD OF SIMULATING FORMATION OF LITHOGRAPHY FEATURES BY SELF-ASSEMBLY OF BLOCK COPOLYMERS
- 专利标题(中): 通过块状共聚物自组装模拟成像特征的方法
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申请号: US14890867申请日: 2014-05-05
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公开(公告)号: US20160078160A1公开(公告)日: 2016-03-17
- 发明人: Sander Frederik WUISTER , Tamara DRUZHININA , Jan VAN MALE , Joanne KLEIN-WOLTERINK , Davide AMBESI
- 申请人: ASML NETHERLANDS B.V.
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 国际申请: PCT/EP2014/059097 WO 20140505
- 主分类号: G06F17/50
- IPC分类号: G06F17/50
摘要:
A method of determining an uncertainty in the position of a domain within a self-assembly block copolymer (BCP) feature. The method includes simulating a BCP feature, calculating a minimum energy position of a first domain within the simulated BCP feature, simulating the application of a potential that causes the position of the first domain to be displaced from the minimum energy position, simulating release of the potential back toward the minimum energy, recording a plurality of energies of the BCP feature during the release and recording at each of the plurality of energies a displacement of the first domain from the minimum energy position, calculating, from the recorded energies and recorded displacements, a probability distribution indicating a probability of the first domain being displaced from the minimum energy position, and, from the probability distribution, calculating an uncertainty in the position of the first domain within the BCP feature.
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