Invention Application
US20160087628A1 Device and Method for Micro-Electro-Mechanical-System Photonic Switch
审中-公开
微电子机械系统光电开关的装置和方法
- Patent Title: Device and Method for Micro-Electro-Mechanical-System Photonic Switch
- Patent Title (中): 微电子机械系统光电开关的装置和方法
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Application No.: US14964138Application Date: 2015-12-09
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Publication No.: US20160087628A1Publication Date: 2016-03-24
- Inventor: Alan Frank Graves , Dominic John Goodwill
- Applicant: Huawei Technologies Co., LTD.
- Main IPC: H03K17/78
- IPC: H03K17/78 ; G01B11/27

Abstract:
In one embodiment, a method includes reflecting, by a first mirror of a first mirror array of a micro-electro-mechanical system (MEMS) photonic switch, an optical control beam to produce an optical control beam spot on a second mirror array of the MEMS photonic switch and cyclic dithering of the first mirror to effective enlargement of a size of the optical control beam spot. The method also includes detecting, by a first photodiode having a first location on the second mirror array, a first intensity of the optical control beam spot.
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