发明申请
- 专利标题: METHOD AND APPARATUS FOR GENERATING PLASMA PULSES
- 专利标题(中): 用于产生等离子体脉冲的方法和装置
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申请号: US14962680申请日: 2015-12-08
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公开(公告)号: US20160093475A1公开(公告)日: 2016-03-31
- 发明人: Roland GESCHE
- 申请人: Forschungsverbund Berlin E.V.
- 申请人地址: DE Berlin
- 专利权人: Forschungsverbund Berlin E.V.
- 当前专利权人: Forschungsverbund Berlin E.V.
- 当前专利权人地址: DE Berlin
- 优先权: DE102012200878.0 20120123
- 主分类号: H01J37/32
- IPC分类号: H01J37/32
摘要:
A method and apparatus generates pulses that can be used for high-precision three-dimensional plasma treatment. At least two sources are furnished with at least one time function, wherein each of the at least two sources radiates an electromagnetic field generated by one of the time functions, and the at least one time function. In a method, the at least two sources cooperate in such a manner that at least one predetermined field strength is realized sequentially in a temporal succession in at least two predetermined space-time points. An alternative method uses at least one source and at least one reflection element. An apparatus with at least two sources and at least one data processing device or at least one source, at least one reflection element and at least one data processing device is configured such that one of the methods can be executed.
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