发明申请
- 专利标题: INTEGRATED CIRCUIT PACKAGING SYSTEM WITH UNDER BUMP METALLIZATION AND METHOD OF MANUFACTURE THEREOF
- 专利标题(中): 集成电路包装系统及其制造方法
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申请号: US14955033申请日: 2015-11-30
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公开(公告)号: US20160099222A1公开(公告)日: 2016-04-07
- 发明人: Il Kwon Shim , Kyung Moon Kim , HeeJo Chi , JunMo Koo , Bartholomew Liao Chung Foh , Zigmund Ramirez Camacho
- 申请人: Il Kwon Shim , Kyung Moon Kim , HeeJo Chi , JunMo Koo , Bartholomew Liao Chung Foh , Zigmund Ramirez Camacho
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
An integrated circuit packaging system and method of manufacture thereof including: providing a substrate; forming contact pads on top of the substrate; forming a protection layer on top of the contact pads and the substrate; exposing the contact pads from the protection layer; printing under bump metallization (UBM) layers over the exposed contact pads extended over the protection layer with conductive inks; and forming bumps on top of the under bump metallization layers. It also including: printing an adhesion layer using conductive ink, wherein the adhesion layer comprises interconnected adhesion layer pads; forming additional under bump metallization (UBM) layers and bumps on top of the adhesion layer pads utilizing an electro-deposition process; and removing connections among the interconnected adhesion layer pads.
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