Invention Application
- Patent Title: FIELD EFFECT TRANSISTOR AND METHOD OF FABRICATION
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Application No.: US14967797Application Date: 2015-12-14
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Publication No.: US20160099333A1Publication Date: 2016-04-07
- Inventor: Hoon Kim , Kisik Choi , Chanro Park
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/78

Abstract:
An improved field effect transistor and method of fabrication are disclosed. A barrier layer stack is formed in the base and sidewalls of a gate cavity. The barrier layer stack has a first metal layer and a second metal layer. A gate electrode metal is deposited in the cavity. The barrier layer stack is thinned or removed on the sidewalls of the gate cavity, to more precisely control the voltage threshold of the field effect transistor.
Information query
IPC分类: