Invention Application
- Patent Title: BIPOLAR TRANSISTOR MANUFACTURING METHOD
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Application No.: US14970341Application Date: 2015-12-15
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Publication No.: US20160099334A1Publication Date: 2016-04-07
- Inventor: Alain Chantre , Pascal Chevalier , Gregory Avenier
- Applicant: STMicroelectronics SA
- Priority: FR1253333 20120411
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8249

Abstract:
A method for manufacturing a bipolar transistor, including the steps of: forming a first surface-doped region of a semiconductor substrate having a semiconductor layer extending thereon with an interposed first insulating layer; forming, at the surface of the device, a stack of a silicon layer and of a second insulating layer; defining a trench crossing the stack and the semiconductor layer opposite to the first doped region, and then an opening in the exposed region of the first insulating layer; forming a single-crystal silicon region in the opening; forming a silicon-germanium region at the surface of single-crystal silicon region, in contact with the remaining regions of the semiconductor layer and of the silicon layer; and forming a second doped region at least in the remaining space of the trench.
Public/Granted literature
- US09640631B2 Bipolar transistor manufacturing method Public/Granted day:2017-05-02
Information query
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